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Difrotec点衍射激光干涉仪–大口径(≥700mm)、高精度(≤0.6nm RMS),
Difrotec公司开发、设计和制造了市场上首台商用点衍射激光干涉仪。该系统具备结构紧凑,用户界面友好,自动测量光学表面面形和光学系统透射波前质量等功能。Difrotec公司开发的点衍射干涉仪具有大口径(≥700mm),高精度(≤0.6nm RMS)等特点。我们是一家以客户需求为导向的公司,根据客户的需求集思广益,提供合适的解决方案。
Difrotec公司的点衍射激光干涉仪广泛应用于平面,球面,非球面等面型的检测。
点衍射激光干涉仪产品特点:
绝对测量精度(Peak-to-valley): ± 0.6 nm (λ/1000)
分辨率(Peak-to-valley): 0.05 nm (λ/12000)
波前重复精度(RMS): < 0.23 nm (λ/2800)
Simple RMS repeatability: < 0.06 nm (λ/10500)
数值口径 NA: 0.55 (f# 0.91)
数据采集: phase-shifting interferometry (PSI)
大口径:Up tp 700mm
不需要出口许可


Difrotec has developed a breakthrough technology in optical testing

Typical measurement system including (from right to left):
D7, laser, optical accessory DA, 6d stage for holding test optics.
The D7 is phase-shifting point diffraction common path interferometer for ultra high accuracy measurements of surface form and transmitted wavefront quality.
The D7 detects the absolute figure of a surface or wavefront. See video
Absolute figure means that the measured form is counted from the absolute reference i.e. perfect spherical wavefront produced by diffraction of light by a sub-wavelength aperture.
Look at our latest product information:
Difrotec_products&services.pdf
Interferometer D7 dimensions:

Peak-to-valley absolute accuracy: ± 0.6 nm (λ/1000)
Peak-to-valley resolution: 0.05 nm (λ/12000)
Wavefront RMS repeatability: < 0.23 nm (λ/2800)
Simple RMS repeatability: < 0.06 nm (λ/10500)
Laser type and wavelength: stabilized He-Ne, 632.8 nm
Numerical aperture NA: 0.55 (f# 0.91)
Data acquisition: phase-shifting interferometry (PSI)
1. Spherical concave surfaces:
2. Spherical convex surfaces:
3. Flat surfaces:
4. Optical systems (wavefront quality testing):

Optical testing and measurement services include testing surface figure of concave, convex, corner cubes, flat, aspheres, freeforms, and transmitted wavefronts of optical systems, and also measurements of curvature radius. (test your optics)

Based on over 30 years experience in computer modeling of high precision optical systems, we have established our own partnerships to design and manufacture high quality optics. Our long-term partner in optics fabrication is KPU – Korea Polytechnic University.
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